Three-dimensional printed microcantilever with mechanical metamaterial for fiber-optic microforce sensing
Famei Wang,
Mengqiang Zou,
Changrui Liao,
Bozhe Li,
Dejun Liu,
Jie Zhou,
Haoqiang Huang,
Jinlai Zhao,
Chao Liu,
Paul K. Chu,
Yiping Wang
Affiliations
Famei Wang
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Mengqiang Zou
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Changrui Liao
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Bozhe Li
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Dejun Liu
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Jie Zhou
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Haoqiang Huang
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Jinlai Zhao
College of Materials Science and Engineering, Shenzhen Key Laboratory of Polymer Science and Technology, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen 518060, China
Chao Liu
School of Electronics Science, Northeast Petroleum University, Daqing 163318, China
Paul K. Chu
Department of Physics, Department of Materials Science and Engineering, and Department of Biomedical Engineering, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, China
Yiping Wang
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
Mechanical metamaterials can adjust mechanical properties of structures flexibly through a mechanical structural design based on the premise that the materials remain unchanged. Here, a cantilever probe microstructure is designed using mechanical metamaterials for an optical fiber microforce sensor tip that can be prepared by femtosecond laser-induced two-photon polymerization. The elastic constant k of the fabricated fiber-optic microforce sensor has been adjusted by two orders of magnitude from 0.165 to 46 N/m, and the geometric configuration of the cantilever beam can be tailored to match the mechanical properties of biological specimens. This fiber microforce sensor shows an ultra-high force sensitivity of 154 nm/µN and a force resolution of up to 130 pN. The optical fiber microforce sensor that shows the lowest force resolution in a direct-contact mode has high potential for biosensing applications, and the results reveal a potential design strategy for special scanning tunneling microscope probes with unique physical properties.
