A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision

Abstract

We present a prototype of a simple, low-cost setup for a fast scatterometric surface texture measurements. We used a total integrated scatter method (TIS) with a semiconductor laser (λ = 638 nm) and a Si photodiode. Using our setup, we estimated the roughness parameters Rq for two reference surfaces (Al mirrors with flatness λ/10) and seven equal steel plates to compare. The setup is easily adaptable for a fast, preliminary manufacturing quality control. We show is possible to construct a low-cost measurement system with nanometric precision.

Keywords

• scatterometry
• surface texture
• optical measurement systems
• surface metrology
• surface roughness