Measurement of Argon emission spectral of ICP plasma using a diagnostic system based on photomultiplier tubes array

Abstract

Optical emission spectroscopy (OES) is one of the most important diagnostic tools in plasma physics. A self-built spectroscopic diagnostic system, owning temporal and spatial resolution, has been constructed using photo multiplier tubes (PMTs) array, spectrometer and other parts. The problem of superposition between inlet plane of bundle fiber and the focal plane of the spectrometer is analyzed and solved. In addition, the synchronization regulation of output of PMTs has been completed. This system is installed on an inductively coupled (ICP) plasma chamber in order to study the Argon (Ar) emission spectrum generated from typical radio frequency (RF) and pulse discharges. The test results show that the intensity of Ar emission spectrum increases with the power and pressure, but increase less with the flow and current ratio. Under pulse discharge condition, the intensity of spectrum does not change with the frequency, neither does the broadening of spectrum with time.