Modelling and Simulation of Micro Electro Mechanical Switch for DC Electrical Power Distribution System

Abstract

This paper investigates the micro electro mechanical system (MEMS) switch for dc electric power distribution system. An electrostatically actuated MEMS switch suitable for power switching application is considered. An electromechanical modelling of the switch has been discussed. The performance characteristics such as actuation voltage, force, switching speed and capacitance are discussed. The switch is designed using MEMS+ software and the simulation has been carried out to get the performance characteristics. The simulation results are compared with the calculation results. A 120V, 3A rating switch array using 10×15 switches have been designed and simulation has been carried out using MEMS+ and Cadence virtuoso tool. The results show the feasibility of using MEMS switches in an array for dc power switching applications.

Keywords

• mems switch
• current interruption
• switching array
• electromechanical modelling
• power distribution