Nebula: Monte Carlo simulator of electron–matter interaction

Abstract

Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–50 keV energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used.We present an open-source software package with first-principle physical models, which can run on GPUs for fast results. Typical electron microscope images can be obtained in minutes instead of hours on consumer-grade hardware, without any loss of accuracy.

Keywords

• Monte Carlo simulation
• Electron scattering
• GPU
• SEM
• Lithography
• Metrology