Meander anisotropic magnetoresistance bridge geomagnetic sensors

L.K. Quynh; B.D. Tu; N.T. Thuy; D.Q. Viet; N.H. Duc; A.T. Phung; D.T. Huong Giang

Journal of Science: Advanced Materials and Devices (Jun 2019)

Meander anisotropic magnetoresistance bridge geomagnetic sensors

L.K. Quynh,
B.D. Tu,
N.T. Thuy,
D.Q. Viet,
N.H. Duc,
A.T. Phung,
D.T. Huong Giang

Affiliations

L.K. Quynh: Key Laboratory for Micro-nano Technology, VNU University of Engineering and Technology, Vietnam National University, Hanoi, 144 Xuan Thuy Road, Cau Giay, Hanoi, Viet Nam; Faculty of Physics, Hanoi Pedagogical University 2, Hanoi, Viet Nam; Corresponding author. Key Laboratory for Micro-nano Technology, VNU University of Engineering and Technology, Vietnam National University, Hanoi, 144 Xuan Thuy Road, Cau Giay, Hanoi, Viet Nam.
B.D. Tu: Key Laboratory for Micro-nano Technology, VNU University of Engineering and Technology, Vietnam National University, Hanoi, 144 Xuan Thuy Road, Cau Giay, Hanoi, Viet Nam
N.T. Thuy: Key Laboratory for Micro-nano Technology, VNU University of Engineering and Technology, Vietnam National University, Hanoi, 144 Xuan Thuy Road, Cau Giay, Hanoi, Viet Nam
D.Q. Viet: Key Laboratory for Micro-nano Technology, VNU University of Engineering and Technology, Vietnam National University, Hanoi, 144 Xuan Thuy Road, Cau Giay, Hanoi, Viet Nam
N.H. Duc: Key Laboratory for Micro-nano Technology, VNU University of Engineering and Technology, Vietnam National University, Hanoi, 144 Xuan Thuy Road, Cau Giay, Hanoi, Viet Nam
A.T. Phung: Hanoi University of Science and Technology, Hanoi, Viet Nam
D.T. Huong Giang: Key Laboratory for Micro-nano Technology, VNU University of Engineering and Technology, Vietnam National University, Hanoi, 144 Xuan Thuy Road, Cau Giay, Hanoi, Viet Nam; Corresponding author.

Journal volume & issue: Vol. 4, no. 2
pp. 327 – 332

Abstract

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Anisotropic magnetoresistive (AMR) sensors have long been used for specific industrial applications. Their field detection sensitivity can be improved using magnetic flux concentrators to amplify the magnetic field strength sensed at the sensor. We report on the design and fabrication of a micrometer-size meander AMR bridge sensor with an effective AMR branch length of 150. This sensor geometry has enabled us to achieve a magnetic sensitivity as high as 1.25 mV/Oe (or 0.45 mV/V/Oe), which is an enhancement by a factor of about 300 compared to conventional AMR thin film-based sensors. Our study paves a new pathway for the design and application of geomagnetic devices. Keywords: Magnetic sensor, Anisotropic magnetoresistance, Wheatstone bridge sensor, Geomagnetic devices, Permalloy

Published in Journal of Science: Advanced Materials and Devices

ISSN: 2468-2284 (Print); 2468-2179 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
Website: https://www.journals.elsevier.com/journal-of-science-advanced-materials-and-devices

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