Improvement of the magnetic properties of Nd–Fe–B/glass two-layer films deposited on Si substrates

Abstract

In a previous study, the authors developed Nd–Fe–B/glass two-layer films deposited on Si substrates using pulsed laser deposition for micro electro mechanical systems. Here, the fabrication conditions of the films were investigated to determine the optimum conditions that enhance the magnetic properties of the films. The annealing time in the pulse-annealing process conducted after the deposition was set to 4.0 s at Nd contents of 14 at.–16 at.%. Moreover, the effect of the glass/Nd–Fe–B thickness ratio on the magnetic properties was examined. A ratio less than 2 resulted in an increase in (BH)max up to 80 kJ/m3.