Improvement of the magnetic properties of Nd–Fe–B/glass two-layer films deposited on Si substrates
M. Nakano,
K. Higuchi,
H. Yamaguchi,
I. Fukuda,
A. Yamashita,
T. Yanai,
T. Shinshi,
H. Fukunaga
Affiliations
M. Nakano
Graduate School of Engineering, Nagasaki University, Nagasaki 852-8521, Japan
K. Higuchi
Graduate School of Engineering, Nagasaki University, Nagasaki 852-8521, Japan
H. Yamaguchi
Graduate School of Engineering, Nagasaki University, Nagasaki 852-8521, Japan
I. Fukuda
Graduate School of Engineering, Nagasaki University, Nagasaki 852-8521, Japan
A. Yamashita
Graduate School of Engineering, Nagasaki University, Nagasaki 852-8521, Japan
T. Yanai
Graduate School of Engineering, Nagasaki University, Nagasaki 852-8521, Japan
T. Shinshi
Laboratory for Future Interdisciplinary Research of Science and Technology, Institute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, Japan
H. Fukunaga
Graduate School of Engineering, Nagasaki University, Nagasaki 852-8521, Japan
In a previous study, the authors developed Nd–Fe–B/glass two-layer films deposited on Si substrates using pulsed laser deposition for micro electro mechanical systems. Here, the fabrication conditions of the films were investigated to determine the optimum conditions that enhance the magnetic properties of the films. The annealing time in the pulse-annealing process conducted after the deposition was set to 4.0 s at Nd contents of 14 at.–16 at.%. Moreover, the effect of the glass/Nd–Fe–B thickness ratio on the magnetic properties was examined. A ratio less than 2 resulted in an increase in (BH)max up to 80 kJ/m3.
