Jixie qiangdu (Jan 2018)
DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE
Abstract
Based on the micro-electro-mechanical systems（MEMS） technology,the chip structure of a two-axis force sensor with comb structure was designed.Silicon force sensitive structure converted the faint mechanical signals into measurable electrical signals.After finite element model was established,the structure and electrical properties of the sensor were analyzed.The corresponding relation between the mechanical signals and the electrical signal was obtained.The mode analysis and harmonic response analysis were performed for the model.The natural frequency of the structure and the harmonic response frequency both are verified that far away from the operating frequency of the system.The work stability and measurement accuracy of the chip are guaranteed.The resolutions of force and moment of the sensor chip are 2.85 μm and 0.0382 μN·m,respectively.The linearity of the signal conversion reached 0.999 6 and 0.999 9.The first and second order modal natural frequency is783.28 Hz and 1 294.3 Hz and harmonic response frequency is 770 Hz.Simulation results meet the requirement of performance specification.
