Cailiao Baohu (Sep 2022)

Research Status and Prospect of Nb - Containing Nitride Hard Film

  • SU Fubin, ZHANG Jun, WANG Xiaoyang, QIAN Chunhui, CHEN Lei

DOI
https://doi.org/10.16577/j.issn.1001-1560.2022.0258
Journal volume & issue
Vol. 55, no. 9
pp. 134 – 140

Abstract

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The preparation technology and microstructure properties like crystal structure, hardness, adhesion and wear resistance of the existing TiNbN hard films were analyzed and overviewed in this paper. Besides, the mechanical properties such as hardness, wear resistance and thermal shock resistance of TiAlNbN hard films were summarized. Finally, the development of TiAlNbN hard film was prospected.

Keywords