Influence of Pre-Ionized Plasma on the Dynamics of a Tin Laser-Triggered Discharge-Plasma

Abstract

The effect of laser-current delay on extreme ultraviolet emission by laser-triggered discharge-plasma has been investigated. Typical waveforms for current, voltage, laser signals, and X-ray signals have been compared. Theoretical tin spectra were simulated among the electron temperature ranges from 10 to 50 eV to compare with the experimental results. The results show that longer laser-current delay time is propitious to increase the steady-state time of plasma at high temperatures, and it increases the intensity and spectral purity of 13.5 nm emission in 2% band. The 13.5 nm radiation intensity increases about 120% with the delay increasing from 0.7 to 5 μs, and the extreme ultraviolet (EUV) emission conversion efficiency (CE) increases from 0.5% to 1.1%.

Keywords

• euv emission
• laser-triggered discharge plasma
• pre-ionized plasma
• tin spectra
• 13.5 nm emission