Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Daehun Lee; Shahin Jahanbani; Jack Kramer; Ruochen Lu; Keji Lai

doi:10.1038/s41467-023-36936-9

Nature Communications (Mar 2023)

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Daehun Lee,
Shahin Jahanbani,
Jack Kramer,
Ruochen Lu,
Keji Lai

Affiliations

Daehun Lee: Department of Physics, University of Texas at Austin
Shahin Jahanbani: Department of Physics, University of Texas at Austin
Jack Kramer: Department of Electrical and Computer Engineering, University of Texas at Austin
Ruochen Lu: Department of Electrical and Computer Engineering, University of Texas at Austin
Keji Lai: Department of Physics, University of Texas at Austin

DOI: https://doi.org/10.1038/s41467-023-36936-9
Journal volume & issue: Vol. 14, no. 1
pp. 1 – 7

Abstract

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Implementing MEMS resonators calls for detailed microscopic understanding of the devices and imperfections from microfabrication. Lee et al. imaged super-high-frequency acoustic resonators with a spatial resolution of 100 nm and a displacement sensitivity of 10 fm/√Hz. Individual overtones, spurious modes, and acoustic leakage are also visualized and analyzed.

Published in Nature Communications

ISSN: 2041-1723 (Online)
Publisher: Nature Portfolio
Country of publisher: United Kingdom
LCC subjects: Science
Website: https://www.nature.com/ncomms/

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