Influence of Laser Annealing on the Structure, Electrical and Optical Properties of Zinc Oxide Thin Films

Abstract

Paper presents experimental results of research of influence of laser annealing on the optical and electrical properties ZnO films. Developed technological regimes of modifications of layers in the production of thin film solar modules.

Keywords

• оксид цинка
• лазерный отжиг
• фотовольтаика
• лазерная микрообработка
• технология