Materials (Aug 2021)

The Effect of Annealing Temperatures on Selected Properties of WC/C Coatings, Deposited Using Hexacarbonyl Wolfram in an N<sub>2</sub>-SiH<sub>4</sub> Atmosphere

  • Peter Horňák,
  • Daniel Kottfer,
  • Karol Kyzioł,
  • Marianna Trebuňová,
  • Mária Kaňuchová,
  • Lukasz Kaczmarek,
  • Jozef Jasenák,
  • Ján Hašuľ,
  • Lukáš Rusinko

DOI
https://doi.org/10.3390/ma14164658
Journal volume & issue
Vol. 14, no. 16
p. 4658

Abstract

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In this paper, we present the results of an experimental study on WC/C coatings, deposited by using plasma-enhanced chemical vapor deposition in an N2-SiH4 atmosphere, annealed at temperatures of 200, 500 and 800 °C, in which the hexacarbonyl of W was used as a precursor. During the experiments, the topography, chemical composition, morphology, as well as selected mechanical properties, such as hardness, Young’s modulus, and coefficient of friction of the WC/C coatings were analyzed. Annealing without the protective atmosphere in the mentioned temperatures caused a decrease in hardness (up to 15 ± 2.7 GPa). In addition, the coefficient of friction value increased only to 0.37 ± 0.03.

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