Vacuum Based Gas Sensing Material Characterization System for Precise and Simultaneous Measurement of Optical and Electrical Responses
Jie Wei,
Meng Zhao,
Cong Wang,
Jun Wang,
Jian-Min Ye,
Yu-Chen Wei,
Zhe-Yi Li,
Run Zhao,
Guo-Zhen Liu,
Yan-Hong Geng,
Rui Wang,
Hui-Dong Xiao,
Ying Li,
Chao-Ya Li,
Zhi-Qiang Gao,
Ju Gao
Affiliations
Jie Wei
Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, Suzhou University of Science and Technology, Suzhou 215009, China
Meng Zhao
Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, Suzhou University of Science and Technology, Suzhou 215009, China
Cong Wang
School of Information and Communication, Harbin Institute of Technology, Harbin 150001, China
Jun Wang
School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
Jian-Min Ye
Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, Suzhou University of Science and Technology, Suzhou 215009, China
Yu-Chen Wei
School of Information and Communication, Harbin Institute of Technology, Harbin 150001, China
Zhe-Yi Li
School of Information and Communication, Harbin Institute of Technology, Harbin 150001, China
Run Zhao
School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
Guo-Zhen Liu
School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
Yan-Hong Geng
Suzhou Institute of Metrology, Suzhou 215009, China
Rui Wang
Suzhou Institute of Metrology, Suzhou 215009, China
Hui-Dong Xiao
Changchun New Industries Optoelectronics Technology Co., Ltd., Changchun 130103, China
Ying Li
Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, Suzhou University of Science and Technology, Suzhou 215009, China
Chao-Ya Li
Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, Suzhou University of Science and Technology, Suzhou 215009, China
Zhi-Qiang Gao
School of Information and Communication, Harbin Institute of Technology, Harbin 150001, China
Ju Gao
School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
Gas sensing performance characterization systems are essential for the research and development of gas sensing materials and devices. Although existing systems are almost completely automatically operated, the accuracies of gas concentration control and of pressure control and the ability to simultaneously detect different sensor signals still require improvement. In this study, a high-precision gas sensing material characterization system is developed based on vacuum technology, with the objective of enabling the precise and simultaneous measurement of electrical responses. Because of the implementation of vacuum technology, the gas concentration control accuracy is improved more than 1600 times, whereas the pressure of the test ambient condition can be precisely adjusted between vacuum and 1.2 bar. The vacuum-assisted gas-exchanging mechanism also enables the sensor response time to be determined more accurately. The system is capable of performing sensitivity, selectivity, and stability tests and can control the ambient relative humidity in a precise manner. More importantly, the levels of performance of three different optical signal measurement set-ups were investigated and compared in terms of detection range, linearity, noise, and response time, based on which of their scopes of application were proposed. Finally, single-period and cyclical tests were performed to examine the ability of the system to detect optical and electrical responses simultaneously, both at a single wavelength and in a spectral region.
