Micromachines (Sep 2022)

All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror

  • Eunmo Kang,
  • Heejoo Choi,
  • Brandon Hellman,
  • Joshua Rodriguez,
  • Braden Smith,
  • Xianyue Deng,
  • Parker Liu,
  • Ted Liang-Tai Lee,
  • Eric Evans,
  • Yifan Hong,
  • Jiafan Guan,
  • Chuan Luo,
  • Yuzuru Takashima

DOI
https://doi.org/10.3390/mi13091444
Journal volume & issue
Vol. 13, no. 9
p. 1444

Abstract

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In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of 0.57°(H) by 0.23° (V) was achieved with 0.588 fps for scanning 1344 points within the field of view.

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