On‐Chip Chemiresistive Sensor Array for On‐Road NOx Monitoring with Quantification

Abstract

Abstract The adverse effects of air pollution on respiratory health make air quality monitoring with high spatial and temporal resolutions essential especially in cities. Despite considerable interest and efforts, the application of various types of sensors is considered immature owing to insufficient sensitivity and cross‐interference under ambient conditions. Here, a fully integrated chemiresistive sensor array (CSA) with parts‐per‐trillion sensitivity is demonstrated with its application for on‐road NOx monitoring. An analytical model is suggested to describe the kinetics of the sensor responses and quantify molecular binding affinities. Finally, the full characterization of the system is connected to implement on‐road measurements on NOx vapor with quantification as its ultimate field application. The obtained results suggest that the CSA shows potential as an essential unit to realize an air‐quality monitoring network with high spatial and temporal resolutions.

Keywords

• chemiresistive sensor arrays
• Langmuir isotherms
• metal oxide semiconductors
• NOx sensors