Numerical and Experimental Study on Thermal Damage Induced by Medium—Infrared Laser
Zhenhua Lei,
Yubin Zhang,
Qingzhi Li,
Ting Shao,
Laixi Sun,
Kaixuan Wang,
Zao Yi,
Xin Ye,
Wanguo Zheng,
Pinghui Wu
Affiliations
Zhenhua Lei
Joint Laboratory for Extreme Conditions Matter Properties, State Key Laboratory of Environmental-Friendly Energy Materials, Tianfu Institute of Research and Innovation, Southwest University of Science and Technology, Mianyang 621010, China
Yubin Zhang
Joint Laboratory for Extreme Conditions Matter Properties, State Key Laboratory of Environmental-Friendly Energy Materials, Tianfu Institute of Research and Innovation, Southwest University of Science and Technology, Mianyang 621010, China
Qingzhi Li
Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Ting Shao
Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Laixi Sun
Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Kaixuan Wang
Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Zao Yi
Joint Laboratory for Extreme Conditions Matter Properties, State Key Laboratory of Environmental-Friendly Energy Materials, Tianfu Institute of Research and Innovation, Southwest University of Science and Technology, Mianyang 621010, China
Xin Ye
Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Wanguo Zheng
Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Pinghui Wu
Research Center for Photonic Technology, Fujian Provincial Key Laboratory for Advanced Micro−Nano Photonics Technology and Devices & Key Laboratory of Information Functional Material for Fujian Higher Education, Quanzhou Normal University, Quanzhou 362000, China
We studied the laser-induced thermal damage on the surface of a single crystal silicon mirror illuminated by a mid-infrared intense laser. We used mid−infrared quasi-continuous wave lasers to irradiate the surface of the single−crystal silicon mirror. The power density of the irradiation process is 1 kW/cm2 to 17 kW/cm2, and the transient temperature field and thermal stress field under different laser fluxes were obtained. The simulation results show that we can calculate the thermal stress and temperature under laser irradiation. In addition, irradiance exceeding the corresponding breaking strength and melting point limit was obtained by the model. We can predict the irradiance that causes cracking and melting. There is little difference between experimental results and simulation results. On this basis, the thermal damage to the surface of the silicon wafer caused by continuous mid−infrared laser irradiation was studied.
