The Sliding-Aperture Transform and Its Applicability to Deep-Level Transient Spectroscopy

Abstract

A mathematical method is presented for the extraction of defect parameters from the multiexponential decays generated during deep-level transient spectroscopy experiments. Such transient phenomenon results from the ionization of charge trapped in defects located in the depletion width of a semiconductor diode. From digitized transients acquired at fixed temperatures, this method produces a rate–domain spectral signature associated with all defects in the semiconductor. For signal-to-noise ratio of 1000, defect levels with carrier emission rates differing by as little as 1.5 times may be distinguished.

Keywords

• DLTS
• transient analysis
• emission rate
• extraction
• curve fitting