Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki (Jun 2019)

SOL-GEL SYNTHESIS OF STRONTIUM TITANATE THIN FILMS AND PERSPECTIVES OF THEIR APPLICATIONS IN PRODUCTION OF ELEMENTS OF ELECTRONIC DEVICE

  • A. H. Sohrabi,
  • N. V. Gaponenko,
  • M. V. Rudenko,
  • S. M. Zavadski,
  • D. A. Golosov,
  • B. S. Kolosnitsin,
  • V. V. Kolos,
  • A. N. Pyatlitski,
  • A. S. Turtsevich

Journal volume & issue
Vol. 0, no. 8
pp. 10 – 15

Abstract

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The strontium titanate thin films were fabricated on silicon using the sol-gel method. The strontium titanate phase was registered with X-ray diffraction analysis after heat treatment in the temperature range 750-1000 °C. The films were deposited by spin-on technique and the film thickness was in the range of 90-250 nm depending on numbers of layer. The perspectives of developments of the sol-gel method for the formation of elements of electronic device as well as varistors and capacitors on the basis of SrTiO3 xerogels are discussed.

Keywords