Light: Science & Applications (Feb 2024)
Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces
Abstract
Abstract An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.