Proceedings (Nov 2018)

Novel 3D-Printed MEMS Magnetometer with Optical Detection

  • Matthias Kahr,
  • Wilfried Hortschitz,
  • Harald Steiner,
  • Michael Stifter,
  • Andreas Kainz,
  • Franz Keplinger

DOI
https://doi.org/10.3390/proceedings2130783
Journal volume & issue
Vol. 2, no. 13
p. 783

Abstract

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This paper reports a novel 3D printed MEMS magnetometer with optical readout, which demonstrates the advantages of 3D printing technology in terms of rapid prototyping. Low-cost and fast product development cycles favour 3D printing as an effective tool. Sensitivity measurement with such devices indicate high accuracy and good structural performance, considering material and technological uncertainties. This paper is focusing on the novelty of the rapid, 3D-printing prototyping approach and verification of the working principle for printed MEMS magnetometers.

Keywords