Micro-Vision Based High-Precision Space Assembly Approach for Trans-Scale Micro-Device: The CFTA Example

Abstract

For assembly of trans-scale micro-device capsule fill tube assemblies (CFTA) for inertial confinement fusion (ICF) targets, a high-precision space assembly approach based on micro-vision is proposed in this paper. The approach consists of three modules: (i) a posture alignment module based on a multi-vision monitoring model that is designed to align two trans-scale micro-parts in 5DOF while one micro-part is in ten microns and the other one is in hundreds of microns; (ii) an insertion depth control module based on a proposed local deformation detection method to control micro-part insertion depth; (iii) a glue mass control module based on simulation research that is designed to control glue mass quantitatively and to bond micro-parts together. A series of experiments were conducted and experimental results reveal that attitude alignment control error is less than ±0.3°, position alignment control error is less than ±5 µm, and insertion depth control error is less than ±5 μm. Deviation of glue spot diameter is controlled at less than 15 μm. A CFTA was assembled based on the proposed approach, the position error in 3D space measured by computerized tomography (CT) is less than 5 μm, and glue spot diameter at the joint is 56 μm. Through volume calculation by the cone calculation formula, the glue mass is about 23 PL when the cone height is half the diameter.

Keywords

• micro-vision
• multi-vision monitoring model
• posture alignment
• glue mass control
• trans-scale micro-device assembly
• micro-assembly