Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis
Hongliang Wang,
Xiao Huang,
Lijun Yu,
Qi Ding,
Hanqiang Zhang,
Changde He,
Wendong Zhang
Affiliations
Hongliang Wang
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Xiao Huang
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Lijun Yu
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Qi Ding
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Hanqiang Zhang
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Changde He
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Wendong Zhang
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent characteristics. This paper studies the method of increasing the bandwidth of the CMUT, proposes the structure of the wideband CMUT with a hybrid cell structure, and analyzes the design principles and characteristics of the wideband CMUT structure. By changing the cell spacing and the number of cells of different sizes composing the CMUT, we analyze the simulation of the effect of the spacing and number on the CMUT bandwidth, thereby optimizing the bandwidth characteristics of the CMUT. Next, the selection principle of the main structural parameters of the wideband CMUT is analyzed. According to the proposed principle, the CMUT in the air and water are designed and simulated. The results prove that both the air and water CMUT meet the design requirements. The design rules obtained in this paper can provide theoretical guidance for the selection of the main structural parameters of the wideband CMUT.
