Effect of High-Temperature Annealing on Graphene with Nickel Contacts

Abstract

Graphene has shown great potential for ultra-high frequency electronics. However, using graphene in electronic devices creates a requirement for electrodes with low contact resistance. Thermal annealing is sometimes used to improve the performance of contact electrodes. However, high-temperature annealing may introduce additional doping or defects to graphene. Moreover, an extensive increase in temperature may damage electrodes by destroying the metal⁻graphene contact. In this work, we studied the effect of high-temperature annealing on graphene and nickel⁻graphene contacts. Annealing was done in the temperature range of 200⁻800 °C and the effect of the annealing temperature was observed by two and four-point probe resistance measurements and by Raman spectroscopy. We observed that the annealing of a graphene sample above 300 °C increased the level of doping, but did not always improve electrical contacts. Above 600 °C, the nickel⁻graphene contact started to degrade, while graphene survived even higher process temperatures.

Keywords

• graphene
• annealing
• doping
• electric contacts