Innovative Integration of Dual Quantum Cascade Lasers on Silicon Photonics Platform

Abstract

For the first time, we demonstrate the hybrid integration of dual distributed feedback (DFB) quantum cascade lasers (QCLs) on a silicon photonics platform using an innovative 3D self-aligned flip-chip assembly process. The QCL waveguide geometry was predesigned with alignment fiducials, enabling a sub-micron accuracy during assembly. Laser oscillation was observed at the designed wavelength of 7.2 μm, with a threshold current of 170 mA at room temperature under pulsed mode operation. The optical output power after an on-chip beam combiner reached sub-milliwatt levels under stable continuous wave operation at 15 °C. The specific packaging design miniaturized the entire light source by a factor of 100 compared with traditional free-space dual lasers module. Divergence values of 2.88 mrad along the horizontal axis and 1.84 mrad along the vertical axis were measured after packaging. Promisingly, adhering to i-line lithography and reducing the reliance on high-end flip-chip tools significantly lowers the cost per chip. This approach opens new avenues for QCL integration on silicon photonic chips, with significant implications for portable mid-infrared spectroscopy devices.

Keywords

• silicon photonics
• flip-chip integration
• quantum cascade laser
• mid-infrared spectroscopy