Results in Physics (Jan 2015)

Fabrication and evaluation of green-light emitting Ta2O5:Er, Ce co-sputtered thin films

  • K. Miura,
  • T. Osawa,
  • T. Suzuki,
  • Y. Yokota,
  • O. Hanaizumi

DOI
https://doi.org/10.1016/j.rinp.2015.02.002
Journal volume & issue
Vol. 5, no. C
pp. 78 – 79

Abstract

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Erbium and cerium co-doped tantalum-oxide (Ta2O5:Er, Ce) thin films were fabricated using radio-frequency co-sputtering of Ta2O5, Er2O3, and CeO2 for the first time. Enhanced green-light emission due to Er3+ that seems to be sensitized by Ce3+ was observed from the film annealed at 900 °C for 20 min. From XRD measurements of the films, the β-Ta2O5 (orthorhombic), δ-Ta2O5 (hexagonal), and (201) Ta2O5 phases seem to be very important for obtaining green PL from them. Such Ta2O5:Er, Ce co-sputtered films can be used as high-refractive-index materials of autocloned photonic crystals that can be applied to novel green-light-emitting devices, and they will also be used as multi-functional coating films that can work both as anti-reflection and down-conversion films for realizing high-efficiency silicon solar cells.

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