Design, Modeling, and Fabrication of High-Speed VCSEL with Data Rate up to 50 Gb/s

Chih-Chiang Shen; Tsung-Chi Hsu; Yen-Wei Yeh; Chieh-Yu Kang; Yun-Ting Lu; Hon-Way Lin; Hsien-Yao Tseng; Yu-Tzu Chen; Cheng-Yuan Chen; Chien-Chung Lin; Chao-Hsin Wu; Po-Tsung Lee; Yang Sheng; Ching-Hsueh Chiu; Hao-Chung Kuo

doi:10.1186/s11671-019-3107-7

Nanoscale Research Letters (Aug 2019)

Design, Modeling, and Fabrication of High-Speed VCSEL with Data Rate up to 50 Gb/s

Chih-Chiang Shen,
Tsung-Chi Hsu,
Yen-Wei Yeh,
Chieh-Yu Kang,
Yun-Ting Lu,
Hon-Way Lin,
Hsien-Yao Tseng,
Yu-Tzu Chen,
Cheng-Yuan Chen,
Chien-Chung Lin,
Chao-Hsin Wu,
Po-Tsung Lee,
Yang Sheng,
Ching-Hsueh Chiu,
Hao-Chung Kuo

Affiliations

Chih-Chiang Shen: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Tsung-Chi Hsu: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Yen-Wei Yeh: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Chieh-Yu Kang: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Yun-Ting Lu: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Hon-Way Lin: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Hsien-Yao Tseng: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Yu-Tzu Chen: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Cheng-Yuan Chen: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Chien-Chung Lin: Institute of Photonic System, National Chiao Tung University
Chao-Hsin Wu: Graduate Institute of Photonics and Optoelectronics, National Taiwan University
Po-Tsung Lee: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Yang Sheng: Crosslight Software Inc., China Branch
Ching-Hsueh Chiu: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University
Hao-Chung Kuo: Department of Photonics & Graduate Institute of Electro-Optical Engineering, College of Electrical and Computer Engineering, National Chiao Tung University

DOI: https://doi.org/10.1186/s11671-019-3107-7
Journal volume & issue: Vol. 14, no. 1
pp. 1 – 6

Abstract

Read online

Abstract We have studied the characteristics of frequency response at 850-nm GaAs high-speed vertical-cavity surface-emitting lasers (VCSELs) with different kinds of oxide aperture sizes and cavity length using the PICS3D simulation program. Using 5-μm oxide aperture sizes, the frequency response behavior can be improved from 18.4 GHz and 15.5 GHz to 21.2 GHz and 19 GHz in a maximum of 3 dB at 25 °C and 85 °C, respectively. Numerical simulation results also suggest that the frequency response performances improved from 21.2 GHz and 19 GHz to 30.5 GHz and 24.5 GHz in a maximum of 3 dB at 25 °C and 85 °C due to the reduction of cavity length from 3λ/2 to λ/2. Consequently, the high-speed VCSEL devices were fabricated on a modified structure and exhibited 50-Gb/s data rate at 85 °C.

Published in Nanoscale Research Letters

ISSN: 1931-7573 (Print); 1556-276X (Online)
Publisher: SpringerOpen
Country of publisher: United Kingdom
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
Website: https://www.springer.com/journal/11671

About the journal

Abstract

Keywords