SOI MEMS Electro-Thermal Actuators for Biomedical Applications: Operation in 0.9% NaCl Solution

Abstract

In recent years, the immense potential for MEMS devices in the biomedical industry has been understood. It has been determined that, among their many plausible functions, their use may also extend to single human red blood cell diagnostics, whereby biomarkers of quantifiable magnitudes may be detected. Without a doubt, the mechanical and thermal specifications by which potential devices must be able to function are very strict. Among them is the ability to operate while fully submerged in aqueous solutions. In this work, six devices were modelled numerically in deionised (DI) water and 0.9 wt% NaCl solution, the results of which were validated experimentally. The mechanical performance of the different devices when fully submerged in 0.9 wt% NaCl solution is hereby discussed. With the exception of one, all the devices in their current configuration are confirmed to be suitable candidates for biomedical applications.

Keywords

• microelectromechanical systems (MEMS)
• numerical modelling
• electro-thermal actuator (ETA)
• V-shaped driver
• fluid–structure interaction
• finite element analysis