Micro and Nano Systems Letters (Sep 2017)

Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor

  • Jun-gu Kang,
  • Joon-Shik Park,
  • Kwang-Bum Park,
  • Junho Shin,
  • Eung-An Lee,
  • Sangsoo Noh,
  • Hoo-Jeong Lee

DOI
https://doi.org/10.1186/s40486-017-0060-z
Journal volume & issue
Vol. 5, no. 1
pp. 1 – 5

Abstract

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Abstract Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating. In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T2 = 6.466R1–642.8, where T2 = temperature of the Pt micro heater and R1 = the electrical resistance of the Pt T sensor. As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors. For the practical use of Pt T sensor in micro gas sensor, the gas sensing properties of fabricated micro gas sensors to 25 ppm CO and 1 ppm HCHO gases were characterized.

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