Effects of Pulsed Arc Ion Plating Process Parameters on Structure and Resistance of Zinc Oxide Piezoelectric Coating

Abstract

In order to provide a scientific reference and basis for exploring and enhancing the fabrication process of ZnO piezoelectric thin films, nanoscale ZnO piezoelectric coatings with strong adhesion were deposited on stainless steel substrates using the pulsed arc ion plating method. The effects of two critical fabrication process parameters, namely working gas pressure and target-to-substrate distance, on the crystal structure and electrical resistance properties of the ZnO piezoelectric sensor coatings were systematically studied. Results showed that a reduction in working gas pressure led to an improvement in the crystallinity of the coatings. As target-to-substrate distance increased, the crystallinity first increased and then decreased, resulting in a decrease in resistance. These findings provided a scientific reference and basis for the application of new permanent thin-film pressure sensors(PMTS) in the pressure monitoring of high and ultra-high-voltage smart casings.

Keywords

• pulsed arc ion plating; zinc oxide; piezoelectric sensors; crystal structure; resistance