Ion flux's pressure dependence in an asymmetric capacitively coupled rf discharge in NF3

• Mateev Emil,
• Zhelyazkov Ivan

Affiliations

Mateev Emil

Institute of Electronics, Bulgarian Academy of Sciences, 72 Tsarigradsko Chausse Blvd, BG-1784, Sofia, Bulgaria

Zhelyazkov Ivan

Faculty of Physics, Sofia University, 5 James Bourchier Blvd, BG-1164, Sofia, Bulgaria