Wear Behaviors of Carbon–Chromium Carbide–Chromium Multilayer Coatings Prepared by Reactive High-Power Impulse Magnetron Sputtering

Abstract

Carbon–chromium carbide–chromium multilayer coatings were deposited by utilizing reactive high-power impulse magnetron sputtering with alternating various ratios of ethyne and argon mixtures under a constant total deposition pressure, target pulse frequency, pulse duty cycle, average chromium target power, and total deposition time. Two different alternating gas mixture periods were applied to obtain films with different numbers of layers and lamination thicknesses. The results show that the reduction in the modulation period effectively affects the elastic modulus and the subsequent ratio of hardness to elastic modulus (H/E) of the whole coating, which helps adapt the elastic strain in the coating. This improves the adhesion strength and wear resistance of coatings at room temperature. However, with the increase in wear test temperature, the difference between the wear behaviors of two types of coatings becomes inconspicuous. Both types of coatings lose the wear resistance due to the decomposition of hydrocarbon and the oxidation of the chromium content in the films.

Keywords

• chromium carbide
• carbon
• ethyne
• high-power impulse magnetron sputtering
• wear