Multi-Ion-Based Modelling and Experimental Investigations on Consistent and High-Throughput Generation of a Micro Cavity Array by Mask Electrolyte Jet Machining

Abstract

The controllability and consistency in the fabrication of micro-textures on large-scale remains a challenge for existing production processes. Mask electrolyte jet machining (MEJM) is an alternative to Jet-ECM for controllable and high-throughput surface microfabrication with more consistency of dimensional tolerances. This hybrid configuration combines the high-throughput of masked-ECM and the adjustable flow-field of jet-ECM. In this work, a duckbill jet nozzle was introduced to make MEJM more capable of batch micro-structuring. A multiphysics model was built to simulate the distribution of electrochemical reaction ions, the current density distribution, and the evolution of the shape of the machined cavity. Experimental investigations are presented showing the influence of the machining voltage and nozzle moving speed on the micro cavity. Several 35×35 micro cavity arrays with a diameter of 11.73–24.92 μm and depth of 7.24–15.86 μm are generated on 304 stainless steel.

Keywords

• micro surface structures
• mask electrolyte jet machining
• electrochemical micro machining