Calculation of temperature and density for dielectric- barrier discharge (DBD) plasma using COMSOL

Abstract

In this paper, a one-dimensional simulation for discus plate dielectric barrier discharge (DBD) is done by COMSOL Multiphysics software. The effects of different parameters such as voltage, frequency, dielectric thickness, dielectric constant and electrode’s material on the temperature and density of electrons are investigated, it is found that secondary electron emission coefficient of the electrode, dielectric constant and the thickness of dielectric have a direct impact on the density of electron. The voltage increment from 5 to 50 kV, causes electron density growing from 4×1017m-3 to 3.2×1018m-3. Based on this study, electron density could reach up to the orders of 1018m-3 by optimizing material and dimensions of dielectric and electrodes without applying high voltage and frequency which results a significant lower production cost.

Keywords

• simulation
• electron density
• electron temperature
• plasma
• comsol