A Technology-Computer-Aided-Design-Based Reliability Prediction Model for DRAM Storage Capacitors

Abstract

A full three-dimensional technology-computer-aided-design-based reliability prediction model was proposed for dynamic random-access memory (DRAM) storage capacitors. The model can be used to predict the time-dependent dielectric breakdown as well as leakage current of a state-of-the-art DRAM storage capacitor with a complex three-dimensional structure.

Keywords

• dynamic random-access memory storage capacitor
• technology-computer-aided design
• reliability
• leakage current
• time-dependent dielectric breakdown