Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions

Joohyeon Bae; Hyunsuk Lee; Duckhyeon Seo; Sangdu Yun; Jeonghyeon Yang; Sunchul Huh; Hyomin Jeong; Jungpil Noh

doi:10.3390/ma13143229

Materials (Jul 2020)

Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions

Joohyeon Bae,
Hyunsuk Lee,
Duckhyeon Seo,
Sangdu Yun,
Jeonghyeon Yang,
Sunchul Huh,
Hyomin Jeong,
Jungpil Noh

Affiliations

Joohyeon Bae: Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeongsang National University, 2 Tongyeonghaean-ro, Tongyeong 53064, Korea
Hyunsuk Lee: Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeongsang National University, 2 Tongyeonghaean-ro, Tongyeong 53064, Korea
Duckhyeon Seo: Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeongsang National University, 2 Tongyeonghaean-ro, Tongyeong 53064, Korea
Sangdu Yun: Department of Mechanical System Engineering, Gyeongsang National University, 2 Tongyeonghaean-ro, Tongyeong 53064, Korea
Jeonghyeon Yang: Department of Mechanical System Engineering, Gyeongsang National University, 2 Tongyeonghaean-ro, Tongyeong 53064, Korea
Sunchul Huh: Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeongsang National University, 2 Tongyeonghaean-ro, Tongyeong 53064, Korea
Hyomin Jeong: Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeongsang National University, 2 Tongyeonghaean-ro, Tongyeong 53064, Korea
Jungpil Noh: Department of Energy and Mechanical Engineering and Institute of Marine Industry, Gyeongsang National University, 2 Tongyeonghaean-ro, Tongyeong 53064, Korea

DOI: https://doi.org/10.3390/ma13143229
Journal volume & issue: Vol. 13, no. 14
p. 3229

Abstract

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TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.

Published in Materials

ISSN: 1996-1944 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering; Technology: Engineering (General). Civil engineering (General); Science: Natural history (General): Microscopy; Science: Physics: Descriptive and experimental mechanics
Website: http://www.mdpi.com/journal/materials/

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