A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer
Tao Liu,
Zhihao Li,
Jiahuan Zhang,
Dongxiao Li,
Hanjie Dou,
Pengfan Wu,
Jiaqian Yang,
Wangyang Zhang,
Xiaojing Mu
Affiliations
Tao Liu
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Zhihao Li
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Jiahuan Zhang
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Dongxiao Li
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Hanjie Dou
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Pengfan Wu
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Jiaqian Yang
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Wangyang Zhang
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Xiaojing Mu
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm2. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%.
