Wide-Band Optical Fibre System for Investigation of MEMS and NEMS Deflection

Orłowska Karolina; Świątkowski Michał; Kunicki Piotr; Słupski Piotr; Sankowska Anna; Sankowska Anna; Sankowska Anna; Sankowska Anna; Gotszalk Teodor

doi:10.2478/mms-2014-0032

Metrology and Measurement Systems (Aug 2014)

Wide-Band Optical Fibre System for Investigation of MEMS and NEMS Deflection

Orłowska Karolina,
Świątkowski Michał,
Kunicki Piotr,
Słupski Piotr,
Sankowska Anna,
Sankowska Anna,
Sankowska Anna,
Sankowska Anna,
Gotszalk Teodor

Affiliations

Orłowska Karolina: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology
Świątkowski Michał: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology
Kunicki Piotr: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology
Słupski Piotr: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology
Sankowska Anna: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology
Sankowska Anna: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology
Sankowska Anna: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology
Sankowska Anna: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology
Gotszalk Teodor: Wroclaw University of Technology, Faculty of Electronics Microsystems and Photonics, Division of Micro- and Nanostructures Metrology

DOI: https://doi.org/10.2478/mms-2014-0032
Journal volume & issue: Vol. 21, no. 3
pp. 381 – 388

Abstract

Read online

In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-band preamplifier are presented.

Published in Metrology and Measurement Systems

ISSN: 2300-1941 (Online)
Publisher: Polish Academy of Sciences
Country of publisher: Poland
LCC subjects: Technology
Website: https://journals.pan.pl/mms

About the journal

Abstract

Keywords