Nature Communications (Jan 2017)
Scalable high-precision tuning of photonic resonators by resonant cavity-enhanced photoelectrochemical etching
Abstract
Aligning the resonances of sets of optical cavities is necessary for advanced photonics and sensing applications. Here, the authors introduce resonant photoelectrochemical etching as a method to collectively and permanently tune the resonant wavelengths of ensembles of resonators on a photonic chip.