Design and Performance of a J Band MEMS Switch

Naibo Zhang; Ze Yan; Ruiliang Song; Chunting Wang; Qiuquan Guo; Jun Yang

doi:10.3390/mi10070467

Micromachines (Jul 2019)

Design and Performance of a J Band MEMS Switch

Naibo Zhang,
Ze Yan,
Ruiliang Song,
Chunting Wang,
Qiuquan Guo,
Jun Yang

Affiliations

Naibo Zhang: The 54th Research Institute of China Electronic Science and Technology Group Corporation, Beijing 100070, China
Ze Yan: Beihang University, Beijing 100083, China
Ruiliang Song: The 54th Research Institute of China Electronic Science and Technology Group Corporation, Beijing 100070, China
Chunting Wang: The 54th Research Institute of China Electronic Science and Technology Group Corporation, Beijing 100070, China
Qiuquan Guo: Department of Mechanical & Materials Engineering, University of Western Ontario, London, ON N6A 3K7, Canada
Jun Yang: Department of Mechanical & Materials Engineering, University of Western Ontario, London, ON N6A 3K7, Canada

DOI: https://doi.org/10.3390/mi10070467
Journal volume & issue: Vol. 10, no. 7
p. 467

Abstract

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This paper presents a novel J band (220−325 GHz) MEMS switch design. The equivalent circuits, the major parameters, capacitance, inductance and resistance in the circuit were extracted and calculated quantitatively to carry out the radio frequency analysis. In addition, the mechanical property of the switch structure is analyzed, and the switching voltage is obtained. With the designed parameters, the MEMS switch is fabricated. The measurement results are in good agreement with simulation results, and the switch is actuated under a voltage of ~30 V. More importantly, the switch has achieved a low insertion loss of ~1.2 dB at 220 GHz and <~4 dB from 220 GHz to 270 GHz in the “UP” state, and isolation of ~16 dB from 220 GHz to 320 GHz in the “DOWN” state. Such switch shows great potential in the integration for terahertz components.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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