Enhanced Copper Bonding Interfaces by Quenching to Form Wrinkled Surfaces

Abstract

For decades, Moore’s Law has been approaching its limits, posing a huge challenge for further downsizing to nanometer dimensions. A promising avenue to replace Moore’s Law lies in three-dimensional integrated circuits, where Cu–Cu bonding plays a critical role. However, the atomic diffusion rate is notably low at temperatures below 300 °C, resulting in a distinct weak bonding interface, which leads to reliability issues. In this study, a quenching treatment of the Cu film surface was investigated. During the quenching treatment, strain energy was induced due to the variation in thermal expansion coefficients between the Si substrate and the Cu film, resulting in a wrinkled surface morphology on the Cu film. Grain growth was observed at the Cu–Cu bonding interface following bonding at 300 °C for 2 and 4 h. Remarkably, these procedures effectively eliminated the bonding interface.

Keywords

• Cu–Cu direct bonding
• wrinkled surface
• grain growth
• quenching treatment
• strain energy