Mechanical impulse enhancement in MEMS using porous silicon combustion process

Abstract

Nanostructured porous silicon impregnated by solid state oxidants has been studied in order to provide the mechanical impulse for jet-propulsion microsystems. The system with jet-propulsion movement on a silicon chip has been used for impulse measurements. The estimated impulse value is in the range of 25-130 mN·s by using of carrying platform for Si chips.

Keywords

• нанопористый кремний
• окислитель
• механический импульс