MECHANICAL PROPERTIES OF MULTILAYERED COATINGS MoN/CrN OBTAINED BY MEANS OF VACUUM-ARC DEPOSITION METHOD

Abstract

Transition metal nitrides of Mo and Cr are characterized by a relatively low heat of formation. The possibilities of elemental and structural engineering of vacuum-arc coatings based on Mo and Cr under the influence of the bias potential Us and the reaction gas pressure PN have been studied. It was found that at a relatively small thickness of the layers of nanometer range, which provides superhard state of the coatings, the supply of Us with the value of above the critical leads to a drop in hardness, which can be explained by mixing of layers at the interphase boundary.