Sapphire-Based Dammann Gratings for UV Beam Splitting

Qian-Kun Li; Qi-Dai Chen; Li-Gang Niu; Yan-Hao Yu; Lei Wang; Yun-Lu Sun; Hong-Bo Sun

doi:10.1109/JPHOT.2016.2620343

IEEE Photonics Journal (Jan 2016)

Sapphire-Based Dammann Gratings for UV Beam Splitting

Qian-Kun Li,
Qi-Dai Chen,
Li-Gang Niu,
Yan-Hao Yu,
Lei Wang,
Yun-Lu Sun,
Hong-Bo Sun

Affiliations

Qian-Kun Li: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
Qi-Dai Chen: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
Li-Gang Niu: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
Yan-Hao Yu: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
Lei Wang: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
Yun-Lu Sun: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
Hong-Bo Sun: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China

DOI: https://doi.org/10.1109/JPHOT.2016.2620343
Journal volume & issue: Vol. 8, no. 6
pp. 1 – 8

Abstract

Read online

We report sapphire-based Dammann gratings (DGs) for ultraviolet (UV) beam (266 nm) splitting, which is fabricated via femtosecond laser direct writing assisted with subsequent wet etching. By applying 400-nm-wavelength laser processing followed by wet etching, smooth surface morphology, together with well-tailored geometry, was obtained. These DGs generated 2 × 2, 3 × 3, 4 × 4, and 5 × 5 spot sources in the fan-out as designed and exhibited diffraction efficiency of 59.26%, 39.53%, 44.68%, and 55.37%, respectively, comparable with theoretical values. Such sapphire-based DGs show great potential in UV beam shaping, UV beam splitting, and laser parallel microprocessing.

Published in IEEE Photonics Journal

ISSN: 1943-0655 (Online)
Publisher: IEEE
Country of publisher: United States
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=4563994

About the journal

Abstract

Keywords