Microestructura de recubrimientos de nitruros metálicos de transición producidos con la técnica de sputtering asistido con campos magnéticos variables.

Abstract

The microstructure of transition metallic nitride coatings is determined by the deposit parameters, which include the substrate temperature, work pressure, partial pressure of nitrogen, discharge power, substrate polarization and the ion to atom flux ratio. All these parameters can control the mobility of atoms, which change the microstructure and the chemical composition of the films. On the other side, the preferential orientation of the coating influences also the mechanical, chemical, optical and electrical properties of the films. In this article the main theories on the phenomenon of the preferential orientation of transition nitride metallic films produced by unbalanced magnetron system are summarized.

Keywords

• Magnetrón desbalanceado
• nitruros metálicos de transición
• microestructura
• orientación preferencial.