Light: Advanced Manufacturing (Dec 2023)

Ultra-wideband Waveguide-coupled Photodiodes Heterogeneously Integrated on a Thin-film Lithium Niobate Platform

  • Chao Wei,
  • Youren Yu,
  • Ziyun Wang,
  • Lin Jiang,
  • Zhongming Zeng,
  • Jia Ye,
  • Xihua Zou,
  • Wei Pan,
  • Xiaojun Xie,
  • Lianshan Yan

DOI
https://doi.org/10.37188/lam.2023.030
Journal volume & issue
Vol. 4, no. 3
pp. 263 – 271

Abstract

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With the advantages of large electro-optical coefficient, wide transparency window, and strong optical confinement, thin-film lithium niobate (TFLN) technique has enabled the development of various high-performance optoelectronics devices, ranging from the ultra-wideband electro-optic modulators to the high-efficient quantum sources. However, the TFLN platform does not natively promise lasers and photodiodes. This study presents an InP/InGaAs modified uni-traveling carrier (MUTC) photodiodes heterogeneously integrated on the TFLN platform with a record-high 3-dB bandwidth of 110 GHz and a responsivity of 0.4 A/W at a 1,550-nm wavelength. It is implemented in a wafer-level TFLN-InP heterogeneous integration platform and is suitable for the large-scale, multi-function, and high-performance TFLN photonic integrated circuits.

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