Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range
Yunqiu Wu,
Yun Wu,
Kai Kang,
Yuanfu Chen,
Yanrong Li,
Tangsheng Chen,
Yuehang Xu
Affiliations
Yunqiu Wu
School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, People’s Republic of China
Yun Wu
Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Device Institute, Nanjing 210016, People’s Republic of China
Kai Kang
School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, People’s Republic of China
Yuanfu Chen
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, People’s Republic of China
Yanrong Li
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, People’s Republic of China
Tangsheng Chen
Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Device Institute, Nanjing 210016, People’s Republic of China
Yuehang Xu
School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, People’s Republic of China
The permittivity and conductivity of chemical vapor deposited monolayer graphene are investigated up to 40 GHz. The characterization method is based on a coplanar waveguide transmission line structure that is fabricated on a multilayer substrate of Si/SiO2/graphene/Al2O3 from the bottom up. The effective relative permittivity of the coplanar waveguide transmission line is extracted using Thru-Reflect-Line calibration and scattering parameter measurements, and then the relative permittivity and corresponding conductivity of graphene are characterized using partial capacitance techniques. The results demonstrate that the conductivity and sheet resistance are remarkably frequency-dependent and that the complex relative permittivity is consistent with the Drude model.
