Metalorganic chemical vapor deposition of InN quantum dots and nanostructures

Caroline E. Reilly; Stacia Keller; Shuji Nakamura; Steven P. DenBaars

doi:10.1038/s41377-021-00593-8

Light: Science & Applications (Jul 2021)

Metalorganic chemical vapor deposition of InN quantum dots and nanostructures

Caroline E. Reilly,
Stacia Keller,
Shuji Nakamura,
Steven P. DenBaars

Affiliations

Caroline E. Reilly: Materials, University of California
Stacia Keller: Electrical and Computer Engineering, University of California
Shuji Nakamura: Materials, University of California
Steven P. DenBaars: Materials, University of California

DOI: https://doi.org/10.1038/s41377-021-00593-8
Journal volume & issue: Vol. 10, no. 1
pp. 1 – 12

Abstract

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This review article describes the current state of InN nanostructure and quantum dot growth by metalorganic chemical vapor deposition and the use in optoelectronic applications.

Published in Light: Science & Applications

ISSN: 2047-7538 (Online)
Publisher: Nature Publishing Group
Country of publisher: United Kingdom
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: https://www.nature.com/lsa/

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