Multiplexed fiber-optic Fabry-Pérot cavities for refractive index and temperature sensing fabricated using diamond-blade dicing

Abstract

We report on multiplexing several Fabry-Pérot (FP) cavities in single-mode optical fibers for highprecision spatially resolved sensing of refractive indices (RI) of liquids. Resonators are fabricated by cutting small slots into fibers using a diamond-blade dicing saw and additional coating with thin Ta2O5 layers to increase cavity reflectance. Temperature compensation of RI measurements is achieved either by evaluating the reflection signals resulting from the solid core parts between different open-cavity sensor elements, or by using a thin Si inlay glued into one of the open cavities. The multiplexing performance and accuracy of the fabricated sensors with up to four open cavities were tested on sucrose solutions over a range of temperatures.