Studying of a Tunneling Accelerometer with Piezoelectric Actuation and Fuzzy Controller

Abstract

This report demonstrates the design of closed-loop micro accelerometer sensor. Proposed sensor consists of a polysilicon cantilever micro beam as a proof mass and uses the extreme sensitivity of electron tunneling to variations in electrode separation as sensing element of the sensor. The model uses piezoelectric forces as an actuating element to control the separation between the tunneling electrodes with a low voltage due to large piezoelectric constant. In order to have a proper response time a Fuzzy controller is considered which can be very useful, fast, and reliable. The inputs for the mentioned controller are tunneling current error, gradient of the tunneling current and the summation of errors. And the output is the piezoelectric voltage. Due to the simulation and its results, it is seen that the proposed micro accelerometer have high linearity and dynamic range and also have good respond to the step and sinusoidal acceleration.

Keywords

• Micro acceleration
• piezoelectric
• tunneling current
• fuzzy controller